Publication:

Characterization of threading dislocations in thin germanium layers by defect etching: towards chromium and HF free solution

Date

2008
Journal article
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dc.contributor.authorSouriau, Laurent
dc.contributor.authorAtanasova, Tanya
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorMoussa, Alain
dc.contributor.authorCaymax, Matty
dc.contributor.authorLoo, Roger
dc.contributor.authorMeuris, Marc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-17T10:56:36Z
dc.date.available2021-10-17T10:56:36Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14502
dc.source.beginpageH673
dc.source.endpageH681
dc.source.issue9
dc.source.journalJournal of the Electrochemical Society
dc.source.volume155
dc.title

Characterization of threading dislocations in thin germanium layers by defect etching: towards chromium and HF free solution

dc.typeJournal article
dspace.entity.typePublication
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