Publication:

Patterning challenges in advanced device architectures: FinFETs to nanowire

Date

2016
Proceedings Paper
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Author(s)

Horiguchi, Naoto  
;
Milenin, Alexey  
;
Tao, Zheng  
;
Hody, Hubert  
;
Altamirano Sanchez, Efrain  
;
Veloso, Anabela  
;
Witters, Liesbeth  
;
Waldron, Niamh  
;
Ragnarsson, Lars-Ake  
;
Kim, Min-Soo  
;
Kikuchi, Yoshiaki  
;
Mertens, Hans  
;
Raghavan, Praveen
;
Piumi, Daniele  
;
Collaert, Nadine  
;
Barla, Kathy  
;
Thean, Aaron  

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1969 since deposited on 2021-10-23
Acq. date: 2026-01-11

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