Modeling the topography of uneven substrates post spin-coating

Publication:

2018

Journal article

Author(s)

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Journal of Vacuum Science and Technology B

1 since deposited on 2021-10-25

Acq. date: 2026-10-05

2011 since deposited on 2021-10-25

13last month

3last week

Acq. date: 2026-10-05