Publication:
Modeling the topography of uneven substrates post spin-coating
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0001-7961-9727 | |
| cris.virtual.orcid | 0000-0002-2204-9636 | |
| cris.virtual.orcid | 0000-0002-2430-7360 | |
| cris.virtual.orcid | 0000-0003-1162-9288 | |
| cris.virtualsource.department | d70ee97b-1cd7-4648-9ef2-ac106b21dfb5 | |
| cris.virtualsource.department | 0a1de370-95a1-4a1e-a13d-6497d6c558a1 | |
| cris.virtualsource.department | 7a43e54d-9897-45de-884c-e7dcd19acb63 | |
| cris.virtualsource.department | e02c6ca6-cecb-429d-83d6-f694e6fa422c | |
| cris.virtualsource.orcid | d70ee97b-1cd7-4648-9ef2-ac106b21dfb5 | |
| cris.virtualsource.orcid | 0a1de370-95a1-4a1e-a13d-6497d6c558a1 | |
| cris.virtualsource.orcid | 7a43e54d-9897-45de-884c-e7dcd19acb63 | |
| cris.virtualsource.orcid | e02c6ca6-cecb-429d-83d6-f694e6fa422c | |
| dc.contributor.author | Decoster, Stefan | |
| dc.contributor.author | Piao, Xiaoyu | |
| dc.contributor.author | Gillijns, Werner | |
| dc.contributor.author | Lazzarino, Frederic | |
| dc.contributor.imecauthor | Decoster, Stefan | |
| dc.contributor.imecauthor | Gillijns, Werner | |
| dc.contributor.imecauthor | Lazzarino, Frederic | |
| dc.contributor.orcidimec | Decoster, Stefan::0000-0003-1162-9288 | |
| dc.contributor.orcidimec | Gillijns, Werner::0000-0002-2430-7360 | |
| dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
| dc.date.accessioned | 2021-10-25T17:55:54Z | |
| dc.date.available | 2021-10-25T17:55:54Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2018 | |
| dc.identifier.issn | 1071-1023 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30574 | |
| dc.identifier.url | https://doi.org/10.1116/1.5022166 | |
| dc.source.beginpage | 3.00E+102 | |
| dc.source.issue | 3 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 36 | |
| dc.title | Modeling the topography of uneven substrates post spin-coating | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |