Publication:

Development of AlGaN recess etch for Emode POWER HEMTs

Date

2012
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Author(s)

Mannaert, Geert  
;
Paraschiv, Vasile  
;
De Jaeger, Brice  
;
Van Hove, Marleen
;
Demand, Marc  
;
Decoutere, Stefaan  
;
Boullart, Werner  

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