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Articles
Hard Mask Strategies in Nanoscale Patterning of Mg-Based Oxide Semiconductors: Implications for Advanced Device Architectures
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Hard Mask Strategies in Nanoscale Patterning of Mg-Based Oxide Semiconductors: Implications for Advanced Device Architectures
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Date
2025
Journal article
https://doi.org/10.1021/acsanm.5c04430
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ghorbani, Leila
;
Pavel, Alexandru
;
Dekkers, Harold
;
De Gendt, Stefan
;
Kundu, Shreya
Journal
ACS APPLIED NANO MATERIALS
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since deposited on 2026-05-06
Acq. date: 2026-05-15
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Views
6
since deposited on 2026-05-06
Acq. date: 2026-05-15
Citations