Challenges for spacer and source/drain cavity patterning in CFET devices

Publication:

2023

Proceedings Paper

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Proceedings of SPIE; Vol. 12499

535 since deposited on 2023-06-26

44last month

3last week

Acq. date: 2026-10-05

394 since deposited on 2023-06-26

Acq. date: 2026-10-05