Publication:
Challenges for spacer and source/drain cavity patterning in CFET devices
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Acq. date: 2026-10-12
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559 since deposited on 2023-06-26
60last month
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Acq. date: 2026-10-12
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394 since deposited on 2023-06-26
Acq. date: 2026-10-12
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