Publication:

Challenges for spacer and source/drain cavity patterning in CFET devices

Date

2023-05-16
Proceedings Paper
https://doi.org/http://dx.doi.org/10.1117/12.2658073
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Accepted version 1.32 MB

Author(s)

Mannaert, Geert  
;
Mertens, Hans  
;
Hosseini, Maryam  
;
Demuynck, Steven  
;
Nguyen, Vy Thi Hoang  
;
Chan, BT  
;
Lazzarino, Frederic  

Journal

Proceedings of SPIE; Vol. 12499

Abstract

Description

Statistics

Downloads

317 since deposited on 2023-06-26
24last month
Acq. date: 2026-05-19

Views

389 since deposited on 2023-06-26
3last month
Acq. date: 2026-05-19

Citations

Statistics

Downloads

317 since deposited on 2023-06-26
24last month
Acq. date: 2026-05-19

Views

389 since deposited on 2023-06-26
3last month
Acq. date: 2026-05-19

Citations