Publication:

SOI n- and pMuGFET devices with different TiN metal gate tThickness under influence of sidewall crystal orientation

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1885 since deposited on 2021-10-19
3last month
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Acq. date: 2026-08-08

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Views

1885 since deposited on 2021-10-19
3last month
1last week
Acq. date: 2026-08-08

Citations