Publication:

EUVL at IMEC: shadowing compensation and Flare mitigation

Date

2007-11

Journal article

Simple item page Full metadata Statistics

Files

14483.pdf 413.45 KB

Author(s)

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Goethals, Mieke

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Jonckheere, Rik

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;

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Niroomand, Ardavan

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Journal

Journal of Vacuum Science and Technology B

Metrics

1987 since deposited on 2021-10-16

Acq. date: 2025-12-09