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Articles
EUVL at IMEC: shadowing compensation and Flare mitigation
Publication:
EUVL at IMEC: shadowing compensation and Flare mitigation
Date
2007-11
Journal article
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14483.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lorusso, Gian
;
Goethals, Mieke
;
Jonckheere, Rik
;
Hermans, Jan
;
Ronse, Kurt
;
Myers, Alan
;
Kim, In Sung
;
Niroomand, Ardavan
;
Iwamoto, Fumio
;
Ritter, D.
Journal
Journal of Vacuum Science and Technology B
Abstract
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1985
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1985
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations