Publication:

EUVL at IMEC: shadowing compensation and Flare mitigation

Date

2007-11
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorLorusso, Gian
dc.contributor.authorGoethals, Mieke
dc.contributor.authorJonckheere, Rik
dc.contributor.authorHermans, Jan
dc.contributor.authorRonse, Kurt
dc.contributor.authorMyers, Alan
dc.contributor.authorKim, In Sung
dc.contributor.authorNiroomand, Ardavan
dc.contributor.authorIwamoto, Fumio
dc.contributor.authorRitter, D.
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorHermans, Jan
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecHermans, Jan::0000-0003-1249-8902
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.accessioned2021-10-16T17:38:56Z
dc.date.available2021-10-16T17:38:56Z
dc.date.embargo9999-12-31
dc.date.issued2007-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12515
dc.source.issue6
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume25
dc.title

EUVL at IMEC: shadowing compensation and Flare mitigation

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
14483.pdf
Size:
413.45 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles