Enhanced initial growth of atomic layer deposited metal oxides on hydrogen-terminated silicon

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Author(s)

Frank, Martin M.

;

Chabal, Yves J.

;

Green, Martin

;

Delabie, Annelies

;

Brijs, Bert

;

Wilk, Glen D.

;

Ho, Mun-Yee

;

da Rosa, Elisa B.O.

;

Baumvol, Israel J.R.

;

Stedile, Fernanda C.

Journal

Applied Physics Letters

Metrics

1929 since deposited on 2021-10-15

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Acq. date: 2025-12-09