Enhanced initial growth of atomic layer deposited metal oxides on hydrogen-terminated silicon

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Author(s)

Frank, Martin M.

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Chabal, Yves J.

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Delabie, Annelies

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da Rosa, Elisa B.O.

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Baumvol, Israel J.R.

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Stedile, Fernanda C.

Journal

Applied Physics Letters

Metrics

1927 since deposited on 2021-10-15

Acq. date: 2025-10-24