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Successes and challenges for the electrical performance of high-k gate dielectrics in future CMOS applications

Date

2003
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dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorGroeseneken, Guido
dc.date.accessioned2021-10-15T04:51:22Z
dc.date.available2021-10-15T04:51:22Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7633
dc.source.conferenceInsulating Films on Semiconductors - INFOS. 13th Bi-Annual Conference
dc.source.conferencedate18/06/2003
dc.source.conferencelocationBarcelona Spain
dc.title

Successes and challenges for the electrical performance of high-k gate dielectrics in future CMOS applications

dc.typeOral presentation
dspace.entity.typePublication
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