Publication:

Material studies on Si:C epitaxial films grown by CVD

Date

2014-10
Proceedings Paper
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Author(s)

Dhayalan, Sathish Kumar
;
Loo, Roger  
;
Rosseel, Erik  
;
Hikavyy, Andriy  
;
Shimura, Yosuke
;
Nuytten, Thomas  
;
Richard, Olivier  
;
Bender, Hugo  
;
Douhard, Bastien  
;
Vandervorst, Wilfried  

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