Publication:

Combining TCAD and advanced metrology techniques to support device integration towards N3

Date

2021

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

De Keersgieter, An

;

Celano, Umberto

;

Wouters, Lennaert

;

Chiarella, Thomas

;

Ritzenthaler, Romain

;

;

Richard, Olivier

;

Paredis, Kristof

;

Matagne, Philippe

;

;

Horiguchi, Naoto

;

Journal

na

Statistics

1460 since deposited on 2022-10-25

Acq. date: 2026-02-26