Publication:

Combining TCAD and advanced metrology techniques to support device integration towards N3

Date

2021
Proceedings Paper
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Author(s)

Eyben, Pierre  
;
De Keersgieter, An  
;
Celano, Umberto  
;
Wouters, Lennaert  
;
Chiarella, Thomas  
;
Ritzenthaler, Romain  
;
Mertens, Hans  
;
Richard, Olivier  
;
Paredis, Kristof  
;
Matagne, Philippe  
;
Mitard, Jerome  
;
Horiguchi, Naoto  
;
Goux, Ludovic  

Journal

na

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1461 since deposited on 2022-10-25
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