Publication:

Combining TCAD and advanced metrology techniques to support device integration towards N3

Date

2021
Proceedings Paper
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dc.contributor.authorEyben, Pierre
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorCelano, Umberto
dc.contributor.authorWouters, Lennaert
dc.contributor.authorChiarella, Thomas
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorMertens, Hans
dc.contributor.authorRichard, Olivier
dc.contributor.authorParedis, Kristof
dc.contributor.authorMatagne, Philippe
dc.contributor.authorMitard, Jerome
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorGoux, Ludovic
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.orcidimecEyben, Pierre::0000-0003-3686-556X
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.date.accessioned2022-11-17T14:34:32Z
dc.date.available2022-10-25T02:54:16Z
dc.date.available2022-11-17T14:34:32Z
dc.date.issued2021
dc.identifier.eisbn978-4-86348-779-6
dc.identifier.issnna
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40612
dc.publisherIEEE
dc.source.beginpage84
dc.source.conference20th International Workshop on Junction Technology (IWJT)
dc.source.conferencedateJUN 10-11, 2021
dc.source.conferencelocationVirtual
dc.source.endpage87
dc.source.journalna
dc.source.numberofpages4
dc.title

Combining TCAD and advanced metrology techniques to support device integration towards N3

dc.typeProceedings paper
dspace.entity.typePublication
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