Publication:

Atomic layer deposition of GdHfOx thin films

Date

2009
Proceedings Paper
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Author(s)

Adelmann, Christoph  
;
Pierreux, Dieter  
;
Swerts, Johan  
;
Rosseel, Erik  
;
Shi, Xiaoping
;
Tielens, Hilde  
;
Kesters, Jurgen
;
Van Elshocht, Sven  
;
Kittl, Jorge

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