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Advanced cleaning strategies for ultra-clean silicon surfaces
Publication:
Advanced cleaning strategies for ultra-clean silicon surfaces
Date
1999
Proceedings Paper
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3469.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heyns, Marc
;
Bearda, Twan
;
Cornelissen, Ingrid
;
De Gendt, Stefan
;
Loewenstein, Lee
;
Mertens, Paul
;
Mertens, Sofie
;
Meuris, Marc
;
Schaekers, Marc
;
Teerlinck, Ivo
;
Vos, Rita
;
Wolke, K.
Journal
Abstract
Description
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2011
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations
Metrics
Views
2011
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations