Publication:

Advanced cleaning strategies for ultra-clean silicon surfaces

Date

1999
Proceedings Paper
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dc.contributor.authorHeyns, Marc
dc.contributor.authorBearda, Twan
dc.contributor.authorCornelissen, Ingrid
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorLoewenstein, Lee
dc.contributor.authorMertens, Paul
dc.contributor.authorMertens, Sofie
dc.contributor.authorMeuris, Marc
dc.contributor.authorSchaekers, Marc
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVos, Rita
dc.contributor.authorWolke, K.
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorCornelissen, Ingrid
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorVos, Rita
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.accessioned2021-10-06T11:20:44Z
dc.date.available2021-10-06T11:20:44Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3509
dc.source.beginpage459
dc.source.conferenceProceedings of the 9th International Conference on Production Engineering - ICPE
dc.source.conferencedate29/08/1999
dc.source.conferencelocationOsaka Japan
dc.title

Advanced cleaning strategies for ultra-clean silicon surfaces

dc.typeProceedings paper
dspace.entity.typePublication
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