Publication:
Electrical and structural properties of oxygen-precipitation induced extended defects in silicon
Date
| dc.contributor.author | Claeys, C. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-09-30T08:00:35Z | |
| dc.date.available | 2021-09-30T08:00:35Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1772 | |
| dc.source.beginpage | 1469 | |
| dc.source.endpage | 1486 | |
| dc.source.journal | Journal de Physique III | |
| dc.source.volume | 7 | |
| dc.title | Electrical and structural properties of oxygen-precipitation induced extended defects in silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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