Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers

Wan, Danny; Couet, Sebastien; Piao, Xiaoyu; Souriau, Laurent; Canvel, Yann; Tsvetanova, Diana; Vangoidsenhoven, Diziana; Thiam, Arame; Pacco, Antoine; Potocnik, Anton; Mongillo, Massimo; Ivanov, Tsvetan; Jussot, Julien; Verjauw, Jeroen; Acharya, Rohith; Lazzarino, Frederic; Govoreanu, Bogdan; Radu, Iuliana

doi:10.35848/1347-4065/abe5bb

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Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers

Date

2021

Journal article

https://doi.org/10.35848/1347-4065/abe5bb

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Vangoidsenhoven, Diziana

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JAPANESE JOURNAL OF APPLIED PHYSICS

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Acq. date: 2026-04-27

Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers

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