Publication:

Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers

Date

2021
Journal article
https://doi.org/10.35848/1347-4065/abe5bb
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dc.contributor.authorWan, Danny
dc.contributor.authorCouet, Sebastien
dc.contributor.authorPiao, Xiaoyu
dc.contributor.authorSouriau, Laurent
dc.contributor.authorCanvel, Yann
dc.contributor.authorTsvetanova, Diana
dc.contributor.authorVangoidsenhoven, Diziana
dc.contributor.authorThiam, Arame
dc.contributor.authorPacco, Antoine
dc.contributor.authorPotocnik, Anton
dc.contributor.authorMongillo, Massimo
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorJussot, Julien
dc.contributor.authorVerjauw, Jeroen
dc.contributor.authorAcharya, Rohith
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorGovoreanu, Bogdan
dc.contributor.authorRadu, Iuliana
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorCouet, Sebastien
dc.contributor.imecauthorPiao, Xiaoyu
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorCanvel, Yann
dc.contributor.imecauthorTsvetanova, Diana
dc.contributor.imecauthorVangoidsenhoven, Diziana
dc.contributor.imecauthorThiam, Arame
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorPotocnik, Anton
dc.contributor.imecauthorMongillo, Massimo
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorJussot, Julien
dc.contributor.imecauthorVerjauw, Jeroen
dc.contributor.imecauthorAcharya, Rohith
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorGovoreanu, Bogdan
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.orcidimecCouet, Sebastian::0000-0001-6436-9593
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecTsvetanova, Diana::0000-0002-5632-5539
dc.contributor.orcidimecPotocnik, Anton::0000-0002-0352-6388
dc.contributor.orcidimecMongillo, Massimo::0000-0002-6475-6320
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecJussot, Julien::0000-0002-2484-3462
dc.contributor.orcidimecVerjauw, Jeroen::0000-0002-4215-8688
dc.contributor.orcidimecAcharya, Rohith::0000-0003-3958-6435
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecCouet, Sebastien::0000-0001-6436-9593
dc.date.accessioned2022-03-01T15:45:08Z
dc.date.available2022-03-01T15:45:08Z
dc.date.issued2021
dc.identifier.doi10.35848/1347-4065/abe5bb
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39195
dc.publisherIOP PUBLISHING LTD
dc.source.beginpageSBB104
dc.source.issueSB
dc.source.journalJAPANESE JOURNAL OF APPLIED PHYSICS
dc.source.numberofpages6
dc.source.volume60
dc.title

Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers

dc.typeJournal article
dspace.entity.typePublication
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