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Application of selective epitaxial growth in the sub 20 nm FinFET device fabrication
Publication:
Application of selective epitaxial growth in the sub 20 nm FinFET device fabrication
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Date
2014
Proceedings Paper
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28711.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hikavyy, Andriy
;
Rosseel, Erik
;
Eneman, Geert
;
Favia, Paola
;
Loo, Roger
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Downloads
1
since deposited on 2021-10-22
Acq. date: 2025-12-15
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1895
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-15
Citations