Publication:

A Novel Ni-Al Alloy Metal Induced Lateral Crystallization Process for Improved Channel Conduction in 3-D NAND Flash

Date

2022
Journal article
https://doi.org/10.1109/LED.2022.3212105
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Author(s)

Ramesh, Siva  
;
Banerjee, Kaustuv  
;
Opsomer, Karl  
;
Rachita, Iuliana  
;
Bastos, Joao  
;
Soulie, Jean-Philippe  
;
Sebaai, Farid  
;
Favia, Paola  
;
Korytov, Maxim  
;
Richard, Olivier  
;
Breuil, Laurent  
;
Arreghini, Antonio  
;
Van den Bosch, Geert  
;
Rosmeulen, Maarten  

Journal

IEEE ELECTRON DEVICE LETTERS

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1416 since deposited on 2023-03-02
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Acq. date: 2026-01-25

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