Publication:

A Novel Ni-Al Alloy Metal Induced Lateral Crystallization Process for Improved Channel Conduction in 3-D NAND Flash

Date

2022
Journal article
https://doi.org/10.1109/LED.2022.3212105
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dc.contributor.authorRamesh, Siva
dc.contributor.authorBanerjee, Kaustuv
dc.contributor.authorOpsomer, Karl
dc.contributor.authorRachita, Iuliana
dc.contributor.authorBastos, Joao
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorSebaai, Farid
dc.contributor.authorFavia, Paola
dc.contributor.authorKorytov, Maxim
dc.contributor.authorRichard, Olivier
dc.contributor.authorBreuil, Laurent
dc.contributor.authorArreghini, Antonio
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorRosmeulen, Maarten
dc.contributor.imecauthorRamesh, Siva
dc.contributor.imecauthorBanerjee, Kaustuv
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorRachita, Iuliana
dc.contributor.imecauthorBastos, Joao
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorKorytov, Maxim
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.orcidimecRamesh, Siva::0000-0002-8473-7258
dc.contributor.orcidimecBanerjee, Kaustuv::0000-0001-8003-6211
dc.contributor.orcidimecBastos, Joao::0000-0002-8877-9850
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.contributor.orcidimecRachita, Iuliana::0000-0003-0152-6154
dc.contributor.orcidimecSebaai, Farid::0009-0008-0186-6101
dc.contributor.orcidimecKorytov, Maxim::0009-0001-9313-7019
dc.date.accessioned2023-04-25T09:26:25Z
dc.date.available2023-03-02T03:30:59Z
dc.date.available2023-04-25T09:26:25Z
dc.date.issued2022
dc.description.wosFundingTextThis work was supported by IMEC's Industrial Affiliation Program on Storage Memory Devices.
dc.identifier.doi10.1109/LED.2022.3212105
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41213
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage2085
dc.source.endpage2088
dc.source.issue12
dc.source.journalIEEE ELECTRON DEVICE LETTERS
dc.source.numberofpages4
dc.source.volume43
dc.title

A Novel Ni-Al Alloy Metal Induced Lateral Crystallization Process for Improved Channel Conduction in 3-D NAND Flash

dc.typeJournal article
dspace.entity.typePublication
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