Publication:

Atomic layer deposition of TiO2 on surface modified nanoporous low-k films

Date

2013

Journal article

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Files

27578.pdf 925.19 KB

Author(s)

Levrau, Elisabeth

;

Devloo-Casier, Kilain

;

Dendooven, Jolien

;

;

Verdonck, Patrick

;

Meersschaut, Johan

;

Baklanov, Mikhaïl

;

Detavernier, Christophe

Journal

Langmuir

Statistics

1963 since deposited on 2021-10-21

Acq. date: 2026-01-25