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Characterisation of porous low dielectric constant films by ellipsometric porosimetry
Publication:
Characterisation of porous low dielectric constant films by ellipsometric porosimetry
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Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baklanov, Mikhaïl
;
Mogilnikov, K. P.
Journal
Semiconductor Fabtech
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1899
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Acq. date: 2025-12-10
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Metrics
Views
1899
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
Citations