Publication:

High-density and low-leakage novel embedded 3D MIM capacitor on Si interposer

Date

2016

Proceedings Paper

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Author(s)

Roda Neve, Cesar

;

Detalle, Mikael

;

Nolmans, Philip

;

;

;

Van der Plas, Geert

;

;

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1978 since deposited on 2021-10-23

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Acq. date: 2026-02-26