Publication:

Unbiased Roughness Measurements from Low Signal-to-Noise Ratio SEM Images

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2614454
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Author(s)

Mack, Chris A.
;
Severi, Joren  
;
Zidan, Mohamed  
;
De Simone, Danilo  
;
Lorusso, Gian  

Journal

Proceedings of SPIE

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1477 since deposited on 2022-09-08
Acq. date: 2025-10-28

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1477 since deposited on 2022-09-08
Acq. date: 2025-10-28

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