Unbiased Roughness Measurements from Low Signal-to-Noise Ratio SEM Images

dc.contributor.author	Mack, Chris A.
dc.contributor.author	Severi, Joren
dc.contributor.author	Zidan, Mohamed
dc.contributor.author	De Simone, Danilo
dc.contributor.author	Lorusso, Gian
dc.contributor.imecauthor	Severi, Joren
dc.contributor.imecauthor	Zidan, Mohamed
dc.contributor.imecauthor	De Simone, Danilo
dc.contributor.imecauthor	Lorusso, Gian
dc.contributor.orcidimec	De Simone, Danilo::0000-0003-3927-5207
dc.date.accessioned	2022-12-01T09:48:25Z
dc.date.available	2022-09-08T02:38:59Z
dc.date.available	2022-12-01T09:48:25Z
dc.date.issued	2022
dc.identifier.doi	10.1117/12.2614454
dc.identifier.eisbn	978-1-5106-4982-8
dc.identifier.isbn	978-1-5106-4981-1
dc.identifier.issn	0277-786X
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/40380
dc.publisher	SPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage	120530K
dc.source.conference	Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference
dc.source.conferencedate	FEB 24-MAY 27, 2022
dc.source.conferencelocation	San Jose, CA, USA
dc.source.journal	Proceedings of SPIE
dc.source.numberofpages	12
dc.source.volume	12053
dc.title	Unbiased Roughness Measurements from Low Signal-to-Noise Ratio SEM Images
dc.type	Proceedings paper
dspace.entity.type	Publication
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