Publication:

Inline evaluation of MOS capacitor properties using SEM transient signals

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3049839

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Author(s)

Shirasaki, Yasuhiro

;

Yachi, Kazufumi

;

;

;

Arimura, Hiroaki

;

;

;

Horiguchi, Naoto

Journal

Proceedings of SPIE

Statistics

56 since deposited on 2025-07-28

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Acq. date: 2026-07-19