Publication:
Inline evaluation of MOS capacitor properties using SEM transient signals
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-7422-079X | |
| cris.virtual.orcid | 0000-0003-3498-5082 | |
| cris.virtual.orcid | 0000-0001-5490-0416 | |
| cris.virtual.orcid | 0000-0002-3138-708X | |
| cris.virtualsource.department | 821dc741-8843-4d53-8e1d-6f543228a740 | |
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| cris.virtualsource.department | 9f04b13f-f81c-4d48-a5bd-0b2cb5210392 | |
| cris.virtualsource.department | b2592186-7449-4534-aafc-90d91a0beb8a | |
| cris.virtualsource.orcid | 821dc741-8843-4d53-8e1d-6f543228a740 | |
| cris.virtualsource.orcid | 0cddeaa4-4a9c-44ee-a5d6-ba4f3945e8a7 | |
| cris.virtualsource.orcid | 9f04b13f-f81c-4d48-a5bd-0b2cb5210392 | |
| cris.virtualsource.orcid | b2592186-7449-4534-aafc-90d91a0beb8a | |
| dc.contributor.author | Shirasaki, Yasuhiro | |
| dc.contributor.author | Yachi, Kazufumi | |
| dc.contributor.author | Hu, Yajian | |
| dc.contributor.author | Shoji, Minami | |
| dc.contributor.author | Arimura, Hiroaki | |
| dc.contributor.author | Mitard, Jerome | |
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.author | Horiguchi, Naoto | |
| dc.contributor.imecauthor | Arimura, Hiroaki | |
| dc.contributor.imecauthor | Mitard, Jerome | |
| dc.contributor.imecauthor | Lorusso, Gian | |
| dc.contributor.imecauthor | Horiguchi, Naoto | |
| dc.contributor.orcidimec | Arimura, Hiroaki::0000-0002-3138-708X | |
| dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
| dc.contributor.orcidimec | Lorusso, Gian::0000-0003-3498-5082 | |
| dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
| dc.date.accessioned | 2025-07-28T03:57:27Z | |
| dc.date.available | 2025-07-28T03:57:27Z | |
| dc.date.issued | 2025 | |
| dc.identifier.doi | 10.1117/12.3049839 | |
| dc.identifier.eisbn | 978-1-5106-8639-7 | |
| dc.identifier.isbn | 978-1-5106-8638-0 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45952 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.beginpage | 134263G-1 | |
| dc.source.conference | 2025 Conference on Metrology Inspection and Process Control-Annual | |
| dc.source.conferencedate | 2025-02-24 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.endpage | 134263G-7 | |
| dc.source.journal | Proceedings of SPIE | |
| dc.source.numberofpages | 7 | |
| dc.title | Inline evaluation of MOS capacitor properties using SEM transient signals | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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