Publication:

Probe chip nanofabrication enabled reverse tip sample scanning probe microscopy concept and measurements

Date

2024
Journal article
https://doi.org/10.1088/1361-6528/ad3744
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dc.contributor.authorKim, Hyeon-Su
dc.contributor.authorPeric, Nemanja
dc.contributor.authorMinj, Albert
dc.contributor.authorWouters, Lennaert
dc.contributor.authorSerron, Jill
dc.contributor.authorMancini, Chiara
dc.contributor.authorKoylan, Serkan
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorHantschel, Thomas
dc.contributor.imecauthorKim, Hyeon-Su
dc.contributor.imecauthorPeric, Nemanja
dc.contributor.imecauthorMinj, Albert
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorSerron, Jill
dc.contributor.imecauthorMancini, Chiara
dc.contributor.imecauthorKoylan, Serkan
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecPeric, Nemanja::0009-0005-1291-332X
dc.contributor.orcidimecMinj, Albert::0000-0003-0878-3276
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimecSerron, Jill::0000-0002-9101-8139
dc.contributor.orcidimecKoylan, Serkan::0000-0002-3069-3712
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2025-07-03T11:57:33Z
dc.date.available2024-04-15T17:21:09Z
dc.date.available2025-07-03T11:57:33Z
dc.date.embargo2024-04-09
dc.date.issued2024
dc.description.wosFundingTextThis work was done in the imec IIAP core CMOS programs. We acknowledge the provided support by Bruker Corporation in the framework of an imec-Bruker joint development project on the development of RTS SPM. Hyeon-Su Kim acknowledges the financial support of his scholarship by the Korean government (P0017312).
dc.identifier.doi10.1088/1361-6528/ad3744
dc.identifier.issn0957-4484
dc.identifier.pmidMEDLINE:38522105
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43842
dc.publisherIOP Publishing Ltd
dc.source.beginpageArt. 265703
dc.source.endpageN/A
dc.source.issue26
dc.source.journalNANOTECHNOLOGY
dc.source.numberofpages10
dc.source.volume35
dc.subject.keywordsATOMIC-FORCE MICROSCOPY
dc.subject.keywordsARTIFACTS
dc.title

Probe chip nanofabrication enabled reverse tip sample scanning probe microscopy concept and measurements

dc.typeJournal article
dspace.entity.typePublication
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