Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Low-k dielectric materials
Publication:
Low-k dielectric materials
Copy permalink
Date
2004
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Shamiryan, Denis
;
Abell, Thomas
;
Iacopi, Francesca
;
Maex, Karen
Journal
Materials Today
Abstract
Description
Statistics
Views
1985
since deposited on 2021-10-15
3
last month
1
last week
Acq. date: 2026-01-25
Citations
Statistics
Views
1985
since deposited on 2021-10-15
3
last month
1
last week
Acq. date: 2026-01-25
Citations