Publication:
Low-k dielectric materials
Date
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Abell, Thomas | |
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T16:11:33Z | |
| dc.date.available | 2021-10-15T16:11:33Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9586 | |
| dc.source.beginpage | 34 | |
| dc.source.endpage | 39 | |
| dc.source.issue | 1 | |
| dc.source.journal | Materials Today | |
| dc.source.volume | 7 | |
| dc.title | Low-k dielectric materials | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |