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In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit
Publication:
In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit
Date
2015
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sawada, Ken
;
Van der Plas, Geert
;
Mori, Shigetaka
;
Cherman, Vladimir
;
Mercha, Abdelkarim
;
Verkest, Diederik
;
Fukuzaki, Yuzo
;
Ammo, Hiroaki
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1848
since deposited on 2021-10-22
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Acq. date: 2025-10-29
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Metrics
Views
1848
since deposited on 2021-10-22
1
last week
Acq. date: 2025-10-29
Citations