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In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit

Date

2015
Proceedings Paper
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dc.contributor.authorSawada, Ken
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorMori, Shigetaka
dc.contributor.authorCherman, Vladimir
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorVerkest, Diederik
dc.contributor.authorFukuzaki, Yuzo
dc.contributor.authorAmmo, Hiroaki
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.accessioned2021-10-22T22:35:09Z
dc.date.available2021-10-22T22:35:09Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25866
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7106126
dc.source.beginpage145
dc.source.conferenceInternational Conference on Microelectronic Test Structures - ICMTS
dc.source.conferencedate23/03/2015
dc.source.conferencelocationTempe, AZ USA
dc.source.endpage149
dc.title

In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit

dc.typeProceedings paper
dspace.entity.typePublication
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