Publication:
Au-free CMOS-compatible AlGaN/GaN HEMT processing on 200 mm Si substrates
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2062 since deposited on 2021-10-20
1last month
Acq. date: 2026-09-19
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2062 since deposited on 2021-10-20
1last month
Acq. date: 2026-09-19
Citations