Publication:
Au-free CMOS-compatible AlGaN/GaN HEMT processing on 200 mm Si substrates
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2046 since deposited on 2021-10-20
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Acq. date: 2025-12-11
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2046 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2025-12-11
Citations