Publication:

Au-free CMOS-compatible AlGaN/GaN HEMT processing on 200 mm Si substrates

Date

2012
Proceedings Paper
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dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorWellekens, Dirk
dc.contributor.authorKang, Xuanwu
dc.contributor.authorLiang, Hu
dc.contributor.authorMannaert, Geert
dc.contributor.authorGeens, Karen
dc.contributor.authorDecoutere, Stefaan
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorWellekens, Dirk
dc.contributor.imecauthorLiang, Hu
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorGeens, Karen
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecGeens, Karen::0000-0003-1815-3972
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.accessioned2021-10-20T10:31:18Z
dc.date.available2021-10-20T10:31:18Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20543
dc.source.beginpage49
dc.source.conference24th International Symposium on Power Semiconductor Devices & IC's - ISPSD
dc.source.conferencedate3/06/2012
dc.source.conferencelocationBrugge Belgium
dc.source.endpage52
dc.title

Au-free CMOS-compatible AlGaN/GaN HEMT processing on 200 mm Si substrates

dc.typeProceedings paper
dspace.entity.typePublication
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