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Conference contributions
Low temperature pre-epi Treatment: critical parameters to control interface contamination
Publication:
Low temperature pre-epi Treatment: critical parameters to control interface contamination
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Date
2013
Meeting abstract
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27356.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hikavyy, Andriy
;
Loo, Roger
;
Dhayalan, Sathish Kumar
;
Wostyn, Kurt
;
Rosseel, Erik
;
Simoen, Eddy
;
Machkaoutsan, Vladimir
;
Profijt, Harald
;
Tolle, John
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Acq. date: 2025-12-15
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1975
since deposited on 2021-10-21
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Acq. date: 2025-12-15
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Downloads
1
since deposited on 2021-10-21
Acq. date: 2025-12-15
Views
1975
since deposited on 2021-10-21
3
last month
Acq. date: 2025-12-15
Citations