Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Low temperature pre-epi Treatment: critical parameters to control interface contamination
Publication:
Low temperature pre-epi Treatment: critical parameters to control interface contamination
Date
2013
Meeting abstract
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
27356.pdf
33.71 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hikavyy, Andriy
;
Loo, Roger
;
Dhayalan, Sathish Kumar
;
Wostyn, Kurt
;
Rosseel, Erik
;
Simoen, Eddy
;
Machkaoutsan, Vladimir
;
Profijt, Harald
;
Tolle, John
Journal
Abstract
Description
Metrics
Downloads
1
since deposited on 2021-10-21
Acq. date: 2025-10-25
Views
1969
since deposited on 2021-10-21
451
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Downloads
1
since deposited on 2021-10-21
Acq. date: 2025-10-25
Views
1969
since deposited on 2021-10-21
451
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations