Publication:

Low temperature pre-epi Treatment: critical parameters to control interface contamination

Date

2013
Meeting abstract
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dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLoo, Roger
dc.contributor.authorDhayalan, Sathish Kumar
dc.contributor.authorWostyn, Kurt
dc.contributor.authorRosseel, Erik
dc.contributor.authorSimoen, Eddy
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorProfijt, Harald
dc.contributor.authorTolle, John
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-21T08:17:05Z
dc.date.available2021-10-21T08:17:05Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22490
dc.source.conferenceE-MRS Fall Meeting Symposium A: Alternative Semiconductor Integration in Si Microelectronics
dc.source.conferencedate16/09/2013
dc.source.conferencelocationWarsaw Poland
dc.title

Low temperature pre-epi Treatment: critical parameters to control interface contamination

dc.typeMeeting abstract
dspace.entity.typePublication
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