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Linewidth dependence of the reverse bias junction leakage for co-silicided source/drain junctions
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Linewidth dependence of the reverse bias junction leakage for co-silicided source/drain junctions
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Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lauwers, Anne
;
de Potter de ten Broeck, Muriel
;
Lindsay, Richard
;
Chamirian, Oxana
;
Demeurisse, Caroline
;
Vrancken, Christa
;
Maex, Karen
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1878
since deposited on 2021-10-14
Acq. date: 2025-12-10
Citations
Metrics
Views
1878
since deposited on 2021-10-14
Acq. date: 2025-12-10
Citations