Linewidth dependence of the reverse bias junction leakage for co-silicided source/drain junctions

dc.contributor.author	Lauwers, Anne
dc.contributor.author	de Potter de ten Broeck, Muriel
dc.contributor.author	Lindsay, Richard
dc.contributor.author	Chamirian, Oxana
dc.contributor.author	Demeurisse, Caroline
dc.contributor.author	Vrancken, Christa
dc.contributor.author	Maex, Karen
dc.contributor.imecauthor	Lauwers, Anne
dc.contributor.imecauthor	de Potter de ten Broeck, Muriel
dc.contributor.imecauthor	Demeurisse, Caroline
dc.contributor.imecauthor	Vrancken, Christa
dc.contributor.imecauthor	Maex, Karen
dc.date.accessioned	2021-10-14T22:10:41Z
dc.date.available	2021-10-14T22:10:41Z
dc.date.issued	2002
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/6529
dc.source.beginpage	29
dc.source.conference	Silicon Materials - Processing, Characterization, and Reliability
dc.source.conferencedate	1/04/2002
dc.source.conferencelocation	San Francisco, CA USA
dc.source.endpage	34
dc.title	Linewidth dependence of the reverse bias junction leakage for co-silicided source/drain junctions
dc.type	Proceedings paper
dspace.entity.type	Publication
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