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Heteroepitaxy of InP on Si(001) in sub-50nm width trenches by Selective-Area Metalorganic Vapor-Phase Epitaxy: the role of the nucleation layer and the recess engineering
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1969 since deposited on 2021-10-22
Acq. date: 2025-10-23
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Views
1969 since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations