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Heteroepitaxy of InP on Si(001) in sub-50nm width trenches by Selective-Area Metalorganic Vapor-Phase Epitaxy: the role of the nucleation layer and the recess engineering

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1973 since deposited on 2021-10-22
2last week
Acq. date: 2026-02-26

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Views

1973 since deposited on 2021-10-22
2last week
Acq. date: 2026-02-26

Citations