Publication:

Electrode process dependent NBTI chracteristics of TiN gate FinFETs

Date

2012-04

Proceedings Paper

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Author(s)

;

;

Pantisano, Luigi

;

Chiarella, Thomas

;

Togo, Mitsuhiro

;

Horiguchi, Naoto

;

Groeseneken, Guido

;

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1918 since deposited on 2021-10-20

Acq. date: 2026-01-26