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Surface processes occuring on TiSi2 and CoSi2 in fluorine-based plasmas: afterglow of NF3 plasma
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2024 since deposited on 2021-09-30
3last month
Acq. date: 2025-12-08
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2024 since deposited on 2021-09-30
3last month
Acq. date: 2025-12-08
Citations