Publication:
Poly SiGe, a promising material for MEMS post-processing on top of standard CMOS wafers
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1829 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-16
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Views
1829 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-16
Citations