Publication:
Poly SiGe, a promising material for MEMS post-processing on top of standard CMOS wafers
Date
| dc.contributor.author | Sedky, Sherif | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Baert, Kris | |
| dc.date.accessioned | 2021-10-14T17:47:15Z | |
| dc.date.available | 2021-10-14T17:47:15Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5641 | |
| dc.source.beginpage | 988 | |
| dc.source.conference | Transducers '01. Eurosensors XV. The 11th International Conference on Solid-State Sensors and Actuators; June 10-14, 2001. Munic | |
| dc.source.conferencedate | 10/06/2001 | |
| dc.source.conferencelocation | München Germany | |
| dc.source.endpage | 991 | |
| dc.title | Poly SiGe, a promising material for MEMS post-processing on top of standard CMOS wafers | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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