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Intrinsic study of current crowding and current density gradient effects on electromigration in BEOL copper interconnects
Publication:
Intrinsic study of current crowding and current density gradient effects on electromigration in BEOL copper interconnects
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Date
2013
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Croes, Kristof
;
Li, Yunlong
;
Lofrano, Melina
;
Wilson, Chris
;
Tokei, Zsolt
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1859
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Acq. date: 2025-12-15
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Views
1859
since deposited on 2021-10-21
4
last month
Acq. date: 2025-12-15
Citations