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Evaluating probes for "electrical" atomic force microscopy

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dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorStephenson, Robert
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.contributor.authorMalavé, A.
dc.contributor.authorBüchel, D.
dc.contributor.authorOesterschulze, E.
dc.contributor.authorKulisch, W.
dc.contributor.authorNiedermann, P.
dc.contributor.authorSulzbach, T.
dc.contributor.authorOhlsson, O.
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2021-10-14T13:55:12Z
dc.date.available2021-10-14T13:55:12Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4798
dc.source.beginpage418
dc.source.endpage427
dc.source.issue1
dc.source.journalJ. Vacuum Science and Technology B
dc.source.volumeB18
dc.title

Evaluating probes for "electrical" atomic force microscopy

dc.typeJournal article
dspace.entity.typePublication
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