Publication:

Dry Etching of III-V Layers for Monolithic Optical Device Fabrication on Si

Date

2022-09-20

Meeting abstract

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Author(s)

Milenin, Alexey

;

Yudistira, Didit

;

De Koninck, Yannick

;

Baryshnikova, Marina

;

Kunert, Bernardette

;

Verheyen, Peter

;

Van Campenhout, Joris

;

Pantouvaki, Marianna

;

Journal

N/A

Metrics

960 since deposited on 2022-09-26

Acq. date: 2025-12-15