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Dry Etching of III-V Layers for Monolithic Optical Device Fabrication on Si
Publication:
Dry Etching of III-V Layers for Monolithic Optical Device Fabrication on Si
Date
2022-09-20
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Milenin, Alexey
;
Yudistira, Didit
;
De Koninck, Yannick
;
Baryshnikova, Marina
;
Kunert, Bernardette
;
Verheyen, Peter
;
Van Campenhout, Joris
;
Pantouvaki, Marianna
;
Chan, BT
Journal
N/A
Abstract
Description
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Views
958
since deposited on 2022-09-26
Acq. date: 2025-10-23
Citations
Metrics
Views
958
since deposited on 2022-09-26
Acq. date: 2025-10-23
Citations